Hasesenguwe tekinoroji ya tungsten y'umuringa amashanyarazi

Tungsten umuringantabwo ifite kwaguka gake kuranga tungsten gusa, ahubwo ifite nubushyuhe bwo hejuru bwumuriro buranga umuringa.Muguhindura igipimo cya tungsten n'umuringa, coefficente yo kwagura ubushyuhe hamwe nubushuhe bwumuriro wa tungsten hamwe nu muringa wahinduwe, bityo umurima wo gukoresha tungsten hamwe nu muringa ni mwinshi.Umuringa wa Tungsten ukoreshwa cyane mubikoresho bya semiconductor bitewe nuburyo bwiza bwumubiri nubukanishi, ubushobozi bwiza bwo kuyobora amashanyarazi, hamwe na coefficient yo kwagura amashyanyarazi hamwe na wafer ya silicon nibikoresho bya ceramic.

Umwihariko wa tungsten y'umuringa w'amashanyarazi ni uko bisabwa gukora ikizamini cyo gusaza ukurikije ikoranabuhanga rya electroplating hamwe na electroplating sample mbere yo gutanga amashanyarazi.Amashanyarazi ya tungsten-umuringa ashyirwa mu itanura rya vacuum 800 ℃ hanyuma akavurwa no kubika ubushyuhe mu minota 20.

Niba nta reaction mbi nk'ibibyimba no guhindura ibara biboneka mu muringa wa tungsten nyuma y'itanura, byerekana ko nta kibazo kijyanye n'ikoranabuhanga rya electroplating, kandi amashanyarazi ya tungsten-umuringa ashobora gukorwa hakurikijwe ikoranabuhanga.Mugihe habaye ingaruka mbi nkibibyimba no guhindura amabara ya tungsten-umuringa, nyamuneka uhagarike ikoreshwa ryikoranabuhanga kugirango wirinde gutakaza umutungo.Nyamuneka saba abakozi babakozi babigize umwuga kugirango baganire kuri gahunda yo kunoza.Kuberako tungsten y'umuringa ikorwa no guhuza tungsten n'umuringa, kandi tungsten y'icyuma ntishobora gukemuka hamwe nibindi byuma, bityo rero biragoye gukora ikoranabuhanga rya electroplating.

Kubijyanye nuburyo bwa electroplating ya tungsten-umuringa wavanze: Umuringa wa Tungsten ugomba gusukurwa mbere y’amashanyarazi, ukoresheje amazi ya ultrasonic kandi adafite aho abogamiye, umwanda uri hejuru ya tungsten-umuringa uzahanagurwa, kugirango hongerwe imbaraga zifatika za tungsten-umuringa hejuru.Ariko tugomba kumenya ko umukozi ushinzwe isuku abujijwe gukoresha aside ikomeye nibintu bya alkali.Byongeye kandi, mbere yo gusukura no gukoresha amashanyarazi, intera iri hagati yombi ntigomba kuba ndende cyane.Nyuma yo gukora isuku, amashanyarazi agomba gukorwa ako kanya.